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Product Information ?  WEB Catalog  ? Equipment for the Semiconductor Industries  ? N2 Gas/Air Supply Line

N2 Gas/Air Supply Line

A B C D E F G H I J K L M N O P Q R S T U V W X Y Z

Aluminum One-touch Connection and Release High Vacuum Angle Valve XLAQ/XLDQ

  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
SeriesActuationShaft seal
type		Valve
type		MaterialFlange
size
XLAQAir
operated		Bellows sealSingle acting
(N.C.)		Body : Aluminum
Bellows : Stainless steel 316L		16 to 50
XLDQAir
operated		Bellows seal
O-ring seal		Single acting
(N.C.)		Body : Aluminum
Bellows : Stainless steel 316L		40, 50

Stainless Steel High Vacuum Angle/In-line Valve XM/XY

    ?The precision casting, unified composition prevents the accumulation of gas.
    ?The XM series is interchangeable with the XL series aluminum high vacuum angle valve.

    Note) Size 16 is not available for the in-line type.
SeriesActuationShaft seal
type		Valve
type		MaterialFlange
size
XMA/XYAAir operatedBellows sealSingle acting
(N.C.)		Body : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L		16 to 80 Note)
XMC/XYCAir operatedBellows sealDouble actingBody : SCS13 (Eequivalent to
stainless steel 304)
Bellows : Stainless steel 316L		16 to 80 Note)
XMD/XYDAir operatedBellows/O-ring
seal		Single acting
(N.C.)		Body : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L		25 to 80
XMH/XYHManualBellows sealManualBody : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L		16 to 50 Note)

Normal Close High Vacuum Solenoid Valve XSA

    ?Minimum operating pressure: 1 × 10-6 Pa (abs)
    ?Leakage: Internal 1.3 × 10-9 Pa·m3/s, External 1.3 × 10-11 Pa·m3/s
    ?2 types of fittings and female threads are available.
    ?Power consumption: Max. 25% reduction
    ?Weight: Max. 18% lighter (0.5 kg → 0.41 kg)
SeriesValve typeFluidPipingPort size
XSANormally closedAir
Inert gas		Face seal fitting
Compression fitting		1/4, 3/8
XSANormally closedAir
Inert gas		Rc, NPT female thread1/8, 1/4, 3/8

Smooth Vent Valve XVD

    ?The valve/needle valve-integrated construction requires only 1/4 the piping space of previous models.
    ?Particle numbers have been significantly reduced through the use of a metal diaphragm in the sheet portion.
    ?Flow of both the initial air supply and the main air supply can be adjusted.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
SeriesValve typeFluidPipingPort size
XVDNormally closed
(Pressurize to open, Spring seal)		Nitrogen, Air,
Inert gas, etc.		VCR?
Swagelok?		1/4B

Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ

    ?For UHP gas delivery in semiconductor and other clean industries
    ?Body material: 316L SS secondary remelt or 316L SS
    ?Electropolished wetted parts
    ?External metal seal construction
SeriesDescriptionTypeBody material
APFor Ultra High PuritySingle Stage Regulator316L SS secondary remelt
APFor Ultra High PurityTwo Stage Regulator316L SS secondary remelt
APFor Ultra High PurityPneumatic Actuation Pressure Regulator 316L SS secondary remelt
SLFor Ultra High PuritySingle Stage Regulator316L SS secondary remelt
AZFor Ultra High PuritySingle Stage RegulatorSUS316L
AZFor Ultra High PurityPneumatic Actuation Pressure Regulator SUS316L
AKFor General ApplicationsSingle Stage RegulatorSUS316
AKFor General ApplicationsTwo Stage RegulatorSUS316
AKFor General ApplicationsPneumatic Actuation Pressure Regulator SUS316
BPFor Ultra High PurityBack Pressure RegulatorSUS316
BPFor General Applications·Back Pressure RegulatorSUS316

Diaphragm Valve for Ultra High Purity AP

    ?For UHP gas delivery in semiconductor and other clean industries
    ?Used as a gas shutoff valve
    ?No spring is used for the wetted parts and the drive part is also separated from the diaphragm. Dead space in the flow path is small in order to suppress particle generation.
SeriesDescriptionTypeBody material
APFor Ultra High PurityAir Operated Type Diaphragm Valve316L SS secondary remelt
APFor Ultra High PurityManually Operated Type Diaphragm Valve316L SS secondary remelt
APFor Ultra High PurityMetering Valve316L SS secondary remelt
AZFor Ultra High PurityAir Operated Type Diaphragm ValveSUS316L
AZFor Ultra High PurityManually Operated Type Diaphragm ValveSUS316L
AZFor Ultra High PurityMetering ValveSUS316L
AKFor General ApplicationsAir Operated Type Diaphragm ValveSUS316
AKFor General ApplicationsManually Operated Type Diaphragm ValveSUS316
AKFor General ApplicationsMetering ValveSUS316

Check Valve/Vacuum Generator/Flow Switch AP

    [Check valve]
    ?Fluid backflow is prevented by back pressure.
    ?Unique design with only one moving part in the gas stream, an O-ring
    ?Springless structure suppresses particle generation by vibration or chattering and pressure fluctuations on the downstream side

    [Vacuum generator]
    ?Vacuum generation equipment
    ?Applicable to the exhaustion of unnecessary gas remaining inside the piping during gas cylinder replacement

    [Flow switch]
    ?Detects excess flow above a given flow rate caused by pipe breakage, etc.
SeriesTypeBody material
APCheck Valve316L SS secondary remelt
APVacuum Generators316L SS secondary remelt
APFlow Switches316L SS secondary remelt

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